Peer-Reviewed Journal Details

Mandatory Fields

Authors

O’Connor, R and McDonnell, S and Hughes, G and Smith, KE

Year

2006

Month

January

Journal

Title

Photoemission studies of pulsed-RF plasma nitrided ultra-thin SiON dielectric layers

Status

Published

Times Cited

()

Optional Fields

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Volume

600

Issue

3

Start Page

532

End Page

536

Abstract

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ISBN / ISSN

Edition

URL

DOI Link

Grant Details

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Grant Details