Peer-Reviewed Journal Details

Mandatory Fields

Authors

Robert O’Connor, Greg Hughes, Thomas Kauerauf, Lars-Ake Ragnarsson.

Year

2011

Month

Journal

Microelectronic Engineering

Title

Reliability of thin ZrO2 gate dielectric layers

Status

Published

Times Cited

()

Optional Fields

Search Keyword

Volume

51

Issue

Start Page

524

End Page

528

Abstract

Publisher Location

ISBN / ISSN

0167-9317

Edition

URL

DOI Link

Grant Details

Funding Body

Grant Details