Peer-Reviewed Journal Details

Mandatory Fields

Authors

Robert O’Connor, Greg Hughes, Robin Degraeve, Ben Kaczer

Year

2005

Month

Journal

Semiconductor Science and Technology

Title

Temperature-accelerated breakdown in ultra-thin SiON dielectrics.

Status

Published

Times Cited

()

Optional Fields

Search Keyword

Volume

19

Issue

Start Page

1254

End Page

1258

Abstract

11

Publisher Location

ISBN / ISSN

Edition

URL

DOI Link

Grant Details

Funding Body

Grant Details