Mandatory Fields

Authors

I. Reid, Y. Zhang, A. DeMasi, G. Hughes and K. E. Smith

Year

2007

Month

Journal

Thin Solid Films

Title

Electronic structure characterization of Ultra Low-k (ULK) Carbon Doped Oxide (CDO) using X-ray emission spectroscopy.

Status

Published

Times Cited

()

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Volume

Available on line 18th Sept

Issue

Start Page

End Page

Abstract

Publisher Location

ISBN / ISSN

0040-6090

Edition

URL

DOI Link

Grant Details

Funding Body

Grant Details