Peer-Reviewed Journal Details

Mandatory Fields

Authors

O’Connor,R. Hughes,G. Degraeve,R, Kaczer,B.

Year

2004

Month

May

Journal

Microelectronic Engineering

Title

Progressive breakdown in ultra-thin SiON dielectrics and its effect on transistor performance

Status

Published

Times Cited

()

Optional Fields

Search Keyword

Volume

45

Issue

Start Page

869

End Page

874

Abstract

Publisher Location

ISBN / ISSN

0167-9317

Edition

URL

DOI Link

Grant Details

Funding Body

Grant Details