McNally P.

2012 August

Nanomaterials: Processing and Characterization with Lasers

Raman Spectroscopy and its Application in the Characterization of Semiconductor Devices

Published

1

CMOS devices Front-end processing Micro-Raman spectroscopy Raman shifts STI trenches X-ray diffraction

9783527327157

497

510

10.1002/9783527646821.ch7